JPH0354784B2 - - Google Patents

Info

Publication number
JPH0354784B2
JPH0354784B2 JP17099784A JP17099784A JPH0354784B2 JP H0354784 B2 JPH0354784 B2 JP H0354784B2 JP 17099784 A JP17099784 A JP 17099784A JP 17099784 A JP17099784 A JP 17099784A JP H0354784 B2 JPH0354784 B2 JP H0354784B2
Authority
JP
Japan
Prior art keywords
specimen
light receiving
probe
image
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17099784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6150044A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17099784A priority Critical patent/JPS6150044A/ja
Priority to US06/765,670 priority patent/US4718760A/en
Publication of JPS6150044A publication Critical patent/JPS6150044A/ja
Priority to US07/072,121 priority patent/US4732474A/en
Publication of JPH0354784B2 publication Critical patent/JPH0354784B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP17099784A 1984-08-18 1984-08-18 光学的検査方法 Granted JPS6150044A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP17099784A JPS6150044A (ja) 1984-08-18 1984-08-18 光学的検査方法
US06/765,670 US4718760A (en) 1984-08-18 1985-08-14 Apparatus for optically inspecting object having reflecting surface
US07/072,121 US4732474A (en) 1984-08-18 1987-07-10 Apparatus for optically inspecting object having reflecting surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17099784A JPS6150044A (ja) 1984-08-18 1984-08-18 光学的検査方法

Publications (2)

Publication Number Publication Date
JPS6150044A JPS6150044A (ja) 1986-03-12
JPH0354784B2 true JPH0354784B2 (en]) 1991-08-21

Family

ID=15915198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17099784A Granted JPS6150044A (ja) 1984-08-18 1984-08-18 光学的検査方法

Country Status (1)

Country Link
JP (1) JPS6150044A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1126273A1 (en) * 2000-02-09 2001-08-22 Orbis Oy Method and arrangement for inspecting a transparent object for flaws
GB201718699D0 (en) 2017-11-13 2017-12-27 Rolls-Royce Ltd Measuring surface roughness
CN109632824B (zh) * 2019-01-11 2020-04-21 英特尔产品（成都）有限公司 用于物体异常检查的物体检查系统

Also Published As

Publication number Publication date
JPS6150044A (ja) 1986-03-12

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